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TOHFLON Clean Liner

LINER SPEC

Content TOHO SPEC A社 SPEC
LINER SIZE 485 X 685(±20) 495 X 680
Film Thickness(±10%) Inner : 80㎛ Outter : 60㎛
Inner : 60㎛ Outter : 60㎛
Film deposition strength Over 18N/cm 18N/cm
(Measurement value)
Inlet deposition strength Over 18N/cm 18N/cm
(Measurement value)
Overstate test Over 19.6L Over 19.6L

PARTICLE SPEC

n=30
Container pcs / ml
0.2 ㎛ 0.23 ㎛ 0.3 ㎛ 0.5 ㎛ 1.0 ㎛
TOHFLON Clean Liner E19L 3.3 2.7 1.4    
A 社 20   15    

Deposition strength

NOZZLE Deposition strength
Test condition: 50mm/min
Width: 10mm
Company N / cm
TOHO 32.5
A 社 18.7
Condition : Check the change of deposition strength after deposition (at 40℃),PGMEA filling
Item Before deposition The highest strength(N/cm) etc
Deposition for 10days Deposition for 20days Deposition for 30days
Deposition at room temperature Deposition at 40℃ Deposition at room temperature Deposition at 40℃ Deposition at room temperature Deposition at 40℃
TOHO 32.5 32.1 31 30.4 27.8 25.4 29.4  
A 社 18.7 17.2 19 - - 19.5 17.9  
FIRM Deposition strength
Condition : 50mm/min
Width : 10mm
Company N / cm
TOHO 24.3
A 社 20.5
Condition : Check the change of deposition strength after deposition (at 40℃),PGMEA filling
Item Before deposition The highest strength(N/cm) etc
Deposition for 10days Deposition for 20days Deposition for 30days
Deposition at room temperature Deposition at 40℃ Deposition at room temperature Deposition at 40℃ Deposition at room temperature Deposition at 40℃
TOHO 24.3 23 22.7 19.6 31 20.7 22.8  
A 社 20.5 20.8 20.5 - - 20.3 19.1  

Structure

MetalicIon Eruption Test

MetalicIon Eruption Test
- Sample : PE Clean Line
- Material : PGMEA
- Method : ICP mass analysis B102
Sample Component Na Mg AI K Ca Cr Mn Fe Ni Cu Zn Etc
PE LINER
MetalicIon Eruption Test
25℃ PGMEA 1
wEEK
sample <0.1 <0.1 <0.1 <0.1 <0.1 <0.1 <0.1 <0.1 <0.1 <0.1 <0.1  
                         
                         
fixed lowest quantity 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1  
etc. Unit : ppb(ng/ml), Method : ICP mass analysis

Vibration Test

Set the Liner in the Canister, pour 19L of water and test vibration with N=4, 30 min. (3 times)

Drop test

Test CODE
- JIS Z0202
- Pacakge
- Pass the drop test
- Adjust stric requlation under 20kg(LEVER 1)
TEST procedure
- Drop the LINER fulled with water and container from height 60cm
Evaluation
- Test the damage at every direction (Front, Side, Slide,Backside) by dropping

LINER SIZE

(mm)
Class A B C D
A 社 490 678 518 702
A 社 487 675 528 700
TOHO 485 685 500 700
Both are actual value and Value of A,B is ±20mm for TOHO product.